产品概况
设备品牌: | 韩国NANR | 物品产地: | 韩国 |
---|---|---|---|
货物新旧: | 全新 | 界面语言: | 中文 |
销售区域: | 全国 | 售后修期: | 12个月 |
设备品牌: | 韩国NANR | 物品产地: | 韩国 |
---|---|---|---|
货物新旧: | 全新 | 界面语言: | 中文 |
销售区域: | 全国 | 售后修期: | 12个月 |
尺寸 |
直径50〜450 mm |
等级 |
1. 产品级抛光晶圜片(Prime Wafer)-可指定TTV、 颗粒度、电阻值及厚度等 2. 超洁净晶圆(Low Paticle Wafer) 3. 再生晶圆(Reclaim Wafer) 4. 裸片(Coinroll Wafer) SEH, SUMCO, Global Wafers, Siltronic, SK Siltron 等 |
特殊晶圆 |
SOI Wafer、外延片(Epi Wafer)、玻璃晶圆(Glass Wafer)、石英晶圆(Ωuartz Wafer)、化合物晶圆 (Compound Wafer) 等 |
其他 |
根据客户需求可言定制Haze度、激光打标,晶向、Notch方 位、面状态等规格 |
Specifications |
A) 300mm@26nm |
B) 300mm@37nm |
C) 300mm@45nm |
D) 300mm@65nm |
E) 300mm@90nm |
F) 300mm@200nm |
H) 200mm@160nm |
I) 200mm@200nm |
Diameter |
300±0.2mm |
300± 0.2mm |
300±0.2mm |
300±0.2mm |
300±0.2mm |
300±0.2mm |
200±0.2mm |
200±0.2mm |
Growth Method |
CZ |
CZ |
CZ |
CZ |
CZ |
CZ |
CZ |
CZ |
Orientation |
<100> |
<100> |
<100> |
<100> |
<100> |
<100> |
<100> |
<100> |
Type/Dopant |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
Resistivity |
1-50 Ω/cm |
1-50 Ω/cm |
1-50 Ω/cm |
1-100 Ω/cm |
1-100 Ω/cm |
1-100 Ω/cm |
1-50 Ω/cm |
1-50 Ω/cm |
Surface Finish |
Polished/Polished |
Polished/Polished |
Polished/Polished |
Polished/Polished |
Polished/Polished |
Polished/Polished |
Polished/Etched |
Polished/Etched |
Thickness |
775 ± 25pm |
775 ± 25pm |
775 ± 25pm |
775±25pm |
775±25pm |
775±25pm |
725±25pm |
725±25pm |
TTV |
≤1μm |
≤1μm |
≤1μm |
≤3μm |
≤5μm |
≤10μm |
≤2μm |
≤10μm |
BOW/WARP |
<30pm |
<30pm |
<30pm |
<30pm |
<40pm |
<40pm |
<30pm |
<40pm |
Particle |
0.026pm ≤ 100ea |
0.037pm≤70ea |
0.045pm≤50ea |
0.065pm ≤ 50ea |
0.09pm≤50ea |
0.2pm≤50ea |
0.2pm≤30ea |
0.2pm ≤ 50ea |
Film |
None |
None |
None |
None |
None |
None |
None |
None |
Lasermark |
T7/M12 |
T7/M12 |
T7/M12 |
T7/M12 |
T7/M12 |
T7/M12 |
None Laser Scribe |
None Laser Scribe |
Others |
Notch |
Notch |
Notch |
Notch |
Notch |
Notch |
Notch |
Notch |
Time of Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
COA available with each shipment |
Specifications |
A) 6inch Prime Grade |
B) 6inch Test Grade |
C) 4inch Prime Grade |
D) 4inch Test Grade |
Diameter |
150±0.2mm |
150±0.2mm |
100±0.2mm |
100±0.3mm |
Growth Method |
CZ |
CZ |
CZ |
CZ |
Orientation |
<100> |
<100> |
<100> |
<100> |
Type/Dopant |
P/Boron |
P/Boron |
P/Boron |
P/Boron |
Resistivity |
1-100 Ω/cm |
1-100 Ω/cm |
1-100 Ω/cm |
1-100 Ω/cm |
Surface Finish |
Polished/Etched |
Polished/Etched |
Polished/Etched |
Polished/Etched |
Thickness |
675±25pm |
675±25pm |
525±25pm |
525±25pm |
TTV |
≤3pm |
≤10pm |
≤5pm |
≤10pm |
BOW/WARP |
<30pm |
<40pm |
<30pm |
<40pm |
Particle |
0.2pm≤50ea |
0.3pm≤10ea |
0.2pm≤50ea |
0.3pm≤10ea |
Film |
None |
None |
None |
None |
Time of Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
Immediate Shipment |
COA available with each shipment |